In semiconductor production, the effective removal of nitrogen oxides (NOx) is of crucial importance.

DeNOx is a process used to remove nitrogen oxides that are produced during semiconductor production and the subsequent purification of process gases in the subfab. Nitrogen oxides are harmful compounds that endanger the environment and people. The DeNOx process consists of using a catalyst and a reducing agent to absorb or chemically convert nitrogen oxides from the gases before they are released into the atmosphere. This helps to reduce environmental pollution.

DAS Environmental Experts supports its customers with innovative solutions for efficient waste gas treatment. In cooperation with the TU Dresden and the TU Bergakademie Freiberg, DAS EE has developed the pioneering stand-alone solution TSUGA for secondary exhaust gas treatment, which optimally complements burner-wet systems and enables more sustainable production.